Nanoscience and Nanotechnology Faculty
Clifford L. Henderson
College of Engineering
School of Chemical and Biomolecular Engineering
NanoTECH Research Area Affiliations
Professor Hendersonís research is at the intersection of chemical engineering, materials science, and nanotechnology. Professor Hendersonís work is broadly focused on the topics of nanofabrication and nanomanufacturing. Major efforts are directed at the discovery, characterization, fundamental understanding, and development of novel materials and processes that can be used for the nanomanufacturing of unique materials, structures, and devices. The application areas of interest for this work include micro- and nanoelectronics, micro- and nanolithography, microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), optoelectronics and integrated optics, rapid prototyping and rapid manufacturing, and biomaterials/tissue engineering. Examples of current research projects include: (1) development of photoresist materials and processes for sub-100 nm electron beam and 193 nm lithography, (2) characterization and modeling of the physical properties of polymer ultra-thin films, (3) synthesis and processing of novel sacrificial polymeric materials for the fabrication of MEMS/NEMS/microfluidic devices, (4) modeling and analysis of large scale, self-assembly based manufacturing techniques, and (5) development of rapid manufacturing methods for the fabrication of hierarchically physically and chemically structured scaffolds for tissue engineering.
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